Orion Reticle Inspection System

FULLY AUTOMATED IN-LINE RETICLE METROLOGY

The NexTechFAS Orion Reticle Inspection System provides fast, accurate inspection for semiconductor reticles and photomasks. The Orion system’s high-throughput enables 100 percent inspection and qualification of reticles for step and repeat production tools.

Reticles are handled in a class 1 environment when transferring from I/O to the metrology system using the NexTech FAS Titan™ robot.

The Orion incorporates an Aludra™ Reticle Inspection System. The Aludra utilizes solid state non-coherent light sources and light scattering technology to inspect both the pellicle and backside quartz. Typical cycle time is 35 to 70 seconds, dependent on target particle size and required accuracy. Minimum detectable particle size is 1μ. The Aludra technology provides superior particle detection performance and is significantly faster than conventional metrology systems.

The Orion Reticle Inspection System provides for single or multiple I/Os, including SMIF, Toppan or proprietary stepper boxes.

Reticle stocking, reticle cleaning systems and other options are also available.

SUPERIOR PERFORMANCE/SMALL FOOTPRINT

Total Average Cycle Time (TACT) of less than 1 minute.
Particle sensitivity of ≥1μ.
Fully automated system.
Configurable for bulkhead mounting or stand-alone operation.

VERSATILITY

Supports a variety of I/O options including SMIF, Toppan and proprietary stepper boxes.
Pellicle height and edge exclusion zones are software programmable.
Optionally available with multiple I/O ports.

IMPROVES UTILIZATION

10 times faster than conventional scanning technologies.
Enables 100% reticle inspection and qualification for yield enhancement.