NexTech FAS

NexTStar Automated Optical Inspection

NexTStar Automated Optical Inspection

HIGH PERFORMANCE FPD/TFT INSPECTION SYSTEMS

The NexTStar™ Automated Optical Inspection System represents breakthrough performance in FPD pattern, particle and process defect detection. State-of-the-art imaging technology provides high-speed, high-resolution data acquisition and image processing.

The system’s modular optics and image processing modules provide a wide range of defect size inspection capabilities with outstanding total average cycle time (TACT) performance. The NexTStar AOI system is capable of detecting defects as small as 300 nanometers on G2, G3, G4 and larger substrates. The NexTStar is modular and configurable with different magnifications, number of inspection cameras and review cameras. Multi-step examination of in-process FPD glass is facilitated by the superior performance of the NexTStar. The system identifies and maps systemic, processing and environmentally spawned defects, thereby improving the manufacturability and yield of FPD/TFT substrates. NexTech FAS’ proprietary software offers the user ease of use, the best defect detection in the industry and low false call rates.

FEATURES

  • Sub-micron pattern and particle defect inspection
  • Leading edge image processing algorithms
  • Must have for today’s Active Matrix LCD and OLED Technologies
  • Frame rates: 30 fps without “Step and Stare” limitations
  • Detects and maps pattern defects, stains and particles down to 300 nm in size
  • NexTech FAS’ imaging, illumination and image processing technology detects the widest spectrum of defect types

VERSATILITY

  • Defect size and inclusion/exclusion zones per recipe (panel type) are software programmable
  • Bright field and dark field inspection modes facilitate the widest variety of defect types
  • Available in stand alone and in fully automated in-line configurations

IMPROVES QUALITY & PROCESS

  • Cost-effective flat-panel inspection technology
  • Qualification of flat panels prior to usage
  • Generates defect maps for targeted review/process improvement. Optional review camera allows the user to capture high resolution color images of defects

INTEGRATED SOLUTIONS AVAILABLE

  • Manual or automated loading available
  • Environmentally controlled housing

STANDARDS COMPLIANCE

  • Class 1 mini environment available
  • CE, SEMI S2 and other standards available

Facilities Power 208 volts AC, 50/60 Hz. Other power available to customer specification.