NexTech FAS

FPDStar Large Substrate Automated Optical Inspection

FPDStar Large Subrate Automated Optical Inspection

HIGH PERFORMANCE FPD/TFT INSPECTION SYSTEMS

NexTechFAS’ FPDStar is a high performance optical inspection system for identifying and mapping pattern, particle and processing defects on large FPD/TFT substrates.

Proprietary solid state illumination, high resolution CCD cameras and diffraction limited optics are employed in a unique modular design, facilitating the inspection of a wide variety of substrate sizes, defect resolutions and total average cycle times (TACT). The system can accommodate substrates up to 2500 mm x 3000 mm.

At standard resolution, the system inspects substrates for 5 μm defect sizes. Resolutions down to 1 micron or less and multiple magnifications are also available.

The FPDStar’s advanced technology allows inspection of an 1800 mm x 1500 mm (Gen 6) substrate at 5 μm resolution in ~60 seconds. For larger panels, optical and processing modules may be configured to achieve required inspection time.

The system employs a low flight-height air bearing support system, eliminating all contact on the substrate’s front and back surfaces. Glass holding and transport are achieved through the use of high performance linear and nanomotor technologies, ensuring accurate, damage-free substrate handling and high MTBFs.

The NexTech FAS FPDStar demonstrates breakthrough performance in FPD optical inspection systems. The FPDStar is available in stand-alone, fully automated in-line and controlled environment configurations.

SUPERIOR PERFORMANCE

  • Maps 5 μm and larger pattern and particle defects at standard resolution in ~60 seconds.
  • Maps 3 μm and 1 μm defects with objective/magnification change as a customer option.
  • Proprietary cell-to-object or cell-to-cell image processing allows repeating defect or random defect detection modes.

SUPERIOR DESIGN

  • Employs proprietary illumination, CCD cameras and diffraction-limited bright field and dark field optics architecture.
  • Precision stage and vibration-controlled environment allows outstanding repeatability of measurements.
  • Kinematic, pinned and temperature-stabilized optical mounting minimizes optics maintenance.

VERSATILITY

  • Accommodates substrate thicknesses from 0.5 mm to 1.5 mm, or per customer specification.
  • Industry-standard KLARF or customer specified defect file outputs.
  • Graphical User Interface (GUI) for simple operator interface.